Parylene to silicon-nitride bonding for easy post-integration of high-pressure microfluidics to CMOS devices

Ciftlik, Ata TunaEttori, MaximeGijs, Martinus2011-11-112011-11-112011-11-112011https://infoscience.epfl.ch/handle/20.500.14299/72435Parylene BondingParylene to silicon nitride bondingCMOS integrationHigh Pressure MicrofluidicsParylene to silicon-nitride bonding for easy post-integration of high-pressure microfluidics to CMOS devicestext::conference output::conference proceedings::conference paper