Receveur, R. A. M.Marxer, C.Duport, F.Woering, R.Larik, V.de Rooij, N. F.2009-05-122009-05-122009-05-122004https://infoscience.epfl.ch/handle/20.500.14299/39717Laterally Moving Bi-Stable MEMS DC-Switch for Biomedical Applicationstext::conference output::conference proceedings::conference paper