Vertical cavity surface emitting devices incorporating wafer fused reflectors

Sirbu, AlexeiMereuta, AlexandruCaliman, Andrei2013-09-232013-09-232013-09-232013https://infoscience.epfl.ch/handle/20.500.14299/94791The invention refers to a method of manufacturing an optoelectronic device and in particular a method of manufacturing a vertical cavity surface emitting device incorporating wafer fused reflectors.vertical cavity surface emitting laserswafer fused reflectorsVertical cavity surface emitting devices incorporating wafer fused reflectorspatentUS8652936EP2449638US2012134381EP2449638WO201100056842364568