Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals

Prume, K.Muralt, P.Calame, F.Schmitz-Kempen, T.Tiedke, S.2008-04-112008-04-112008-04-11200710.1007/s10832-007-9065-yhttps://infoscience.epfl.ch/handle/20.500.14299/20471WOS:00025179520002811740Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signalstext::journal::journal article::research article