Obi, S.Gale, M. T.Kuoni, A.de Rooij, N. F.2009-05-122009-05-122009-05-12200410.1016/S0167-9317(04)00091-7https://infoscience.epfl.ch/handle/20.500.14299/39649Replication of optical MEMS structures in sol-gel materialstext::journal::journal article::research article