Seol, S. K.Yi, J. M.Jin, X.Kim, C. C.Je, J. H.Tsai, W. L.Hsu, P. C.Hwu, Y.Chen, C. H.Chang, L. W.Margaritondo, G.2006-10-032006-10-032006-10-03200410.1149/1.1775951https://infoscience.epfl.ch/handle/20.500.14299/234206WOS:0002234723000125553Localized electrochemical deposition (LECD) is an emerging technology for inexpensive and effective fabrication of high-aspect-ratio microstructure of diverse materials. Microradiology with coherent X-rays enabled study of this process in real-time. This led to the discovery of a fundamental role of the microelectrode-structure distance: for short distances the deposition rate increases dramatically but the product becomes porous. This role is explained qualitatively with the interplay between metal-ion diffusion and migration in the deposition process. (C) 2004 The Electrochemical Society.ELECTRODEPOSITIONMICROSTRUCTURESCoherent microradiology directly observes a critical cathode-anode distance effect in localized electrochemical depositiontext::journal::journal article::research article