Fantner, GeorgAdams, Jonathan DavidHosseini, Nahid2017-05-112017-05-112017-05-112016https://infoscience.epfl.ch/handle/20.500.14299/137264The present invention relates to a cantilever or membrane comprising a body and an elongated beam attached to the body. The elongated beam includes a first layer comprising a first material, a second layer comprising a second material having an elastic modulus different to that of the first material, a third layer comprising a third material having an elastic modulus different to that of the first material, where the first layer is sandwiched between the second layer and the third layer.patentUS10308500US2018141801EP3298416WO201618945156263998