Investigation of oxidation-induced strain in a top-down Si nanowire platform

Najmzadeh, MohammadBouvet, DidierDobrosz, PeterSarah, OlsenIonescu, Mihai Adrian2012-03-012012-03-012012-03-012009https://infoscience.epfl.ch/handle/20.500.14299/78238Si nanowireOxidation-induced strainMicro-Raman spectroscopyInvestigation of oxidation-induced strain in a top-down Si nanowire platformtext::conference output::conference proceedings::conference paper