Nazir, Saood IbniBellouard, Yves2019-10-192019-10-192019-10-192019-09-0110.3390/mi10090611https://infoscience.epfl.ch/handle/20.500.14299/162099WOS:000489168800013With the advent of ultrafast lasers, new manufacturing techniques have come into existence. In micromachining, the use of femtosecond lasers not only offers the possibility for three-dimensional monolithic fabrication inside a single optically transparent material, but also a means for remotely, and arbitrarily, deforming substrates with nanometer resolution. Exploiting this principle and combining it with flexure design, we demonstrate a monolithic micro-mirror entirely made with a femtosecond laser and whose orientation is tuned in a non-contact manner by exposing some part of the device to low energy femtosecond pulses. Given the non-contact nature of the process, the alignment can be very precisely controlled with a resolution that is many orders of magnitude better than conventional techniques based on mechanical positioners.Nanoscience & NanotechnologyInstruments & InstrumentationScience & Technology - Other TopicsInstruments & Instrumentationfemtosecond laser machiningnon-contacttunable opticsmicro-opticsflexuresrepositioningmonolithicfused silicaintegrated opticsoptical wave-guidesfused-silicaphotosensitive glassmicromechanicsexposuretext::journal::journal article::research article