Dubois, P.von Gunten, S.Enzler, A.Lippuner, U.Dommann, A.de Rooij, N. F.2009-05-122009-05-122009-05-122003https://infoscience.epfl.ch/handle/20.500.14299/39221Reciprocating Silicon Microtribometertext::conference output::conference proceedings::conference paper