Durability of thin PECVD SiOx coatings on polymer films

Leterrier, Y.Rochat, G.Fayet, P.Månson, J.-A. E.2012-06-292012-06-292012-06-291998https://infoscience.epfl.ch/handle/20.500.14299/82699Polyethylene terephthalatepolyethyleneSiOxadhesionDurability of thin PECVD SiOx coatings on polymer filmstext::conference output::conference proceedings::conference paper