A Study of Fabrication Techniques for Sub-10nm Thin Undulated Polysilicon Films

Badila, N.Ecoffey, S.Bouvet, D.Ionescu, A. M.2007-10-102007-10-102007-10-10200310.1109/SMICND.2003.1251353https://infoscience.epfl.ch/handle/20.500.14299/12779A Study of Fabrication Techniques for Sub-10nm Thin Undulated Polysilicon Filmstext::conference output::conference proceedings::conference paper