Linder, C.Paratte, L.Grétillat, M.-A.Jaecklin, V. P.de Rooij, N. F.2009-05-122009-05-122009-05-12199210.1088/0960-1317/2/3/003https://infoscience.epfl.ch/handle/20.500.14299/39542Surface Micromachiningtext::journal::journal article::research article