Analytical Compact Model in Verilog-A for Electrostatically Actuated Ohmic Switches

Bazigos, AntoniosAyala, Christopher L.Fernandez-Bolanos, MontserratPu, YuGrogg, DanielHagleitner, ChristophRana, SunilQin, Tyson TianPamunuwa, DineshIonescu, Adrian M.2014-05-022014-05-022014-05-02201410.1109/TED.2014.2318199https://infoscience.epfl.ch/handle/20.500.14299/103186WOS:000338026200085Nowadays, electronics face a challenge regarding the power consumption of integrated circuits (ICs). There is a need for new devices that can provide improved switching capabilities. The downscaled electrostatically actuated ohmic switch, as a (re)emerging device, is a promising candidate to meet this need. To bring such a device seamlessly into IC design, it must be accompanied by an accurate, fast and robust analytical compact model. The development and the main characteristics of such a model are described within this paper. Extensive numerical simulations and measurements have been used to validate the model.CantileverMEMNEMVerilog-Acompact modelelectrostatic actuationohmic switchrelayswitchAnalytical Compact Model in Verilog-A for Electrostatically Actuated Ohmic Switchestext::journal::journal article::research article