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Infoscience 935 records found 1 - 10nextlast  jump to record: Search took 0.05 seconds. 
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Journal of Vacuum Science and Technology B, 22 (4), 1658-1661 (2004)
2004 | Journal Articles |
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Proceedings of 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03) (2003)
2003 | Conference Papers |
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Journal of Korean Society of Precision Engineering, 21 (8) (2004)
2004 | Journal Articles |
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