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Infoscience 109 records found 1 - 10nextlast  jump to record: Search took 0.03 seconds. 
1.
Proceedings of the Eurosensors XXIII conference (2009)
2009 | Conference Papers |
2.
Sensors and Actuators a-Physical, 162 (2), 260-266 (2010)
2010 | Journal Articles |
3.
Optics Express, 16 (7), 4918-4929 (2008)
2008 | Journal Articles |
4.
Proceedings of the 22nd IEEE International Conference on Micro Electro Mechanical Systems 2009 (2009)
2009 | Conference Papers |
5.
6.
18th European Conference on Sensors and Actuators (Eurosensors), 201-204 (2004)
2004 | Posters |
7.
International Workshop on Wafer Bonding for MEMS (WWB), 12 (5), 455-461 (2004)
2004 | Conference Papers |
8.
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, 12 (5), 455-461 (2006)
2006 | Journal Articles |
9.
Microelectronic Engineering, 85, 972-975 (2008)
2008 | Journal Articles |
10.