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Infoscience 4 records found Search took 0.06 seconds. 
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IEEE/LEOS International Conference on Optical MEMS (2002)
2002 | Conference Papers |
3.
Journal of Microelectromechanical Systems, 15 (5), 1190-1200 (2006)
2006 | Journal Articles |
4.
The IEEE/LEOS Optical MEMS 2004, 36-37 (2004)
2004 | Conference Papers |

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