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Infoscience 41 records found 1 - 10nextlast  jump to record: Search took 0.12 seconds. 
1.
Journal of Micromechanics and Microengineering, 8, 272-278 (1998)
1998 | Journal Articles |
2.
IEEE/LEOS 1996 Summer Topical Meeting Optical MEMS and their applications, 15-16 (1996)
1996 | Conference Papers |
3.
4.
Transducers'99 10th Internat. Conf. on Solid-State Sensors and Actuators, 786-789 (1999)
1999 | Conference Papers |
5.
6.
Journal of Microelectromechanical Systems, 14 (5), 1089-1098 (2005)
2005 | Journal Articles |
7.
Sensors and Actuators, A52, 46-50 (1996)
1996 | Journal Articles |
8.
Optics Express, 14 (10), 4237-4249 (2006)
2006 | Journal Articles |
9.
Optical MEMS 2005, 111-112 (2005)
2005 | Conference Papers |
10.
Proceedings of Transducers 2009, 1 (1), 17-24 (2009)
2009 | Conference Papers |

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