Novel High Speed 3 DOF Linear Drive Operating with Submicron Precision

• Presented at: None, Pittsburgh, USA, October 13-17
• Publication date: 1997

Reference

• LSA-CONF-1997-005
• Conference Web Site: http://www.spie.org/web/meetings/programs/is97/is97_home.html

Record created on 2006-12-07, modified on 2016-08-08