Novel High Speed 3 DOF Linear Drive Operating with Submicron Precision
1998
Details
Title
Novel High Speed 3 DOF Linear Drive Operating with Submicron Precision
Author(s)
Sprenger, B. ; Siegwart, R.
Published in
Microrobotics and Microsystem Fabrication
Series
SPIE Proceedings, 3202
Conference
Conference on Microrobotics and Microsystem Fabrication, Pittsburgh, USA, October 13-17, 1997
Date
1998
Additional link
Conference Web Site
Laboratories
LSA