Dynamical Modelling and Position Control of Ultrasonic Piezoelectric Positioning Stage

The paper describes development of a feedback position controller for a new type of monolithic "hybrid" ultrasonic motor. The goal of the controller design was to demonstrate the main advantage of this piezoelectric motor – high speed and high accuracy at the same time. Tracking of 1 mm steps with 30 nm error in down to 100 ms has been achieved.


Publié dans:
IEEE International Ultrasonics Symposium
Présenté à:
2006 IEEE International Ultrasonics Symposium, Vancouver, Canada, October, 3-6 2006
Année
2006
Mots-clefs:
Laboratoires:


Note: Le statut de ce fichier est: Seulement EPFL


 Notice créée le 2006-12-04, modifiée le 2019-08-12

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