000097201 001__ 97201
000097201 005__ 20190812205007.0
000097201 037__ $$aCONF
000097201 245__ $$aDynamical Modelling and Position Control of Ultrasonic Piezoelectric Positioning Stage
000097201 269__ $$a2006
000097201 260__ $$c2006
000097201 336__ $$aConference Papers
000097201 520__ $$aThe paper describes development of a feedback position controller for a new type of monolithic "hybrid" ultrasonic motor. The goal of the controller design was to demonstrate the main advantage of this piezoelectric motor – high speed and high accuracy at the same time. Tracking of 1 mm steps with 30 nm error in down to 100 ms has been achieved.
000097201 6531_ $$a[HPR-MR]
000097201 6531_ $$a[robotics]
000097201 6531_ $$a[microengineering]
000097201 6531_ $$a[piezoelectric]
000097201 6531_ $$a[control]
000097201 6531_ $$a[ultrasonic]
000097201 700__ $$aHolub, Ondrej
000097201 700__ $$aCimprich, Thomas
000097201 700__ $$aFerreira, Antoine
000097201 700__ $$aHurak, Zdenek
000097201 700__ $$g104634$$aBreguet, Jean-Marc$$0241133
000097201 7112_ $$dOctober, 3-6 2006$$cVancouver, Canada$$a2006 IEEE International Ultrasonics Symposium
000097201 773__ $$tIEEE International Ultrasonics Symposium
000097201 8564_ $$zURL$$uhttp://www.ieee-ultrasonics2006.org/
000097201 8564_ $$zn/a$$uhttps://infoscience.epfl.ch/record/97201/files/Dynamical%20Modelling%20and%20Position%20Control%20of%20Ultrasonic%20Piezoelectric%20Positioning%20Stage.pdf$$s522461
000097201 909C0 $$pLSRO$$0252016
000097201 909CO $$pSTI$$ooai:infoscience.tind.io:97201$$qGLOBAL_SET$$pconf
000097201 937__ $$aLSRO-CONF-2006-073
000097201 973__ $$rREVIEWED$$sPUBLISHED$$aOTHER
000097201 980__ $$aCONF