Dynamical Modelling and Position Control of Ultrasonic Piezoelectric Positioning Stage

The paper describes development of a feedback position controller for a new type of monolithic "hybrid" ultrasonic motor. The goal of the controller design was to demonstrate the main advantage of this piezoelectric motor – high speed and high accuracy at the same time. Tracking of 1 mm steps with 30 nm error in down to 100 ms has been achieved.


Published in:
IEEE International Ultrasonics Symposium
Presented at:
2006 IEEE International Ultrasonics Symposium, Vancouver, Canada, October, 3-6 2006
Year:
2006
Keywords:
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2006-12-04, last modified 2018-01-27

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