Nano-gap MEMS resonators and adapted oscillator design
2006
Details
Title
Nano-gap MEMS resonators and adapted oscillator design
Author(s)
Mazza, M. ; Badila, D. ; Perruisseau-Carrier, J. ; Ionescu, A. M. ; Skrivervik, A.
Conference
NanoTimer Workshop on Micro-Electro-Mechanical Resonators: from Technology to Applications, Lausanne, Switzerland, 2006
Date
2006
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LEMA - Laboratory of ElectroMagnetics and Antennas
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > MAG - Microwave and Antenna Group
Scientific production and competences > STI - School of Engineering > STI Archives > MNWAVE - Adaptive Micronano Wave Systems
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > MAG - Microwave and Antenna Group
Scientific production and competences > STI - School of Engineering > STI Archives > MNWAVE - Adaptive Micronano Wave Systems
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2006-11-30