Details
Title
Wafer-level packaging of MEMS resonators
Author(s)
Jourdain, A. ; Tilmans, H. ; Perruisseau-Carrier, J.
Conference
NanoTimer Workshop on Micro-Electro-Mechanical Resonators: from Technology to Applications, Lausanne, Switzerland, 2006
Date
2006
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LEMA - Laboratory of ElectroMagnetics and Antennas
Scientific production and competences > STI - School of Engineering > STI Archives > MNWAVE - Adaptive Micronano Wave Systems
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Scientific production and competences > STI - School of Engineering > STI Archives > MNWAVE - Adaptive Micronano Wave Systems
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2006-11-30