A Silicon Condenser Microphone with a Highly Perforated Backplate
1991
Details
Title
A Silicon Condenser Microphone with a Highly Perforated Backplate
Author(s)
Bergqvist, J. ; Rudolf, F. ; Maisano, J. ; Parodi, F. ; Rossi, M.
Published in
Proc. Transducers '91
Date
1991
Laboratories
LEMA
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LEMA - Laboratory of ElectroMagnetics and Antennas
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2006-11-30