Journal article

Effect of filler behavior on nanocomposite SU8 photoresist for moving micro- parts

The use of low-stress SU8 nanocomposites as a functional material for micro- parts and coating applications is described in this paper. It was found that the nanoparticles lower the internal stress and decrease the wear rate and frictional coefficient of the SU8 epoxy. The applicability of this technology is demonstrated on gear wheels configuration and coating multilayer capping technology on moving micro-parts

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