Metal/GaN reaction chemistry and their electrical properties

We investigated the reaction chemistry of metal contacts to GaN during annealing using X-ray photoelectron spectroscopy (XPS). GaN decomposition was estimated, using XPS, to occur in N-2 annealed Ni-alloy contacts at 550 degreesC. The reaction was greatly accelerated by the catalytic effect of Au and Pt. The decomposition was correlated with the rapid degradation of electrical properties during annealing. The results suggest that high-temperature applications may be critically limited by the degradation of metal contacts especially due to activated Ni reactivity in Ni-alloyed contacts. Meanwhile, the thermal stability of Ni/Au contact greatly improves by suppressing the activated Ni reactivity, which is able to be obtained by forming preferential Ni-O bonding through annealing in air.


Published in:
Physica Status Solidi B-Basic Research, 241, 12, 2771-2774
Year:
2004
ISSN:
0370-1972
Keywords:
Note:
Pohang Univ Sci & Technol, Dept Mat Sci & Engn, Pohang, South Korea. Acad Sinica, Inst Phys, Taipei 11529, Taiwan. SIFCOM, UMR 6176, CNRS, ENSICAEN, F-14050 Caen, France. Ecole Polytech Fed Lausanne, Inst Phys Nanostruct, CH-1015 Lausanne, Switzerland. Kim, CC, Pohang Univ Sci & Technol, Dept Mat Sci & Engn, Pohang, South Korea. chris@postech.ac.kr
ISI Document Delivery No.: 862KF
Times Cited: 0
Cited Reference Count: 12
Cited References:
AKTAS O, 1996, APPL PHYS LETT, V69, P3872
GUO JD, 1996, J APPL PHYS, V80, P1623
HO JK, 1999, APPL PHYS LETT, V74, P1275
KHAN MA, 1995, APPL PHYS LETT, V66, P1083
KIM CC, 2000, MRS INTERNET J N S R, V6, P4
KIM CC, 2001, APPL PHYS LETT, V78, P3773
LIU QZ, 1998, SOLID STATE ELECTRON, V42, P677
NAKAMURA S, 1993, APPL PHYS LETT, V62, P2390
NAKAMURA S, 1998, APPL PHYS LETT, V72, P2014
PEARTON SJ, 1999, J APPL PHYS, V86, P1
SHEU JK, 1998, J APPL PHYS, V83, P3172
VENUGOPALAN HS, 1997, J APPL PHYS, V82, P650
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 Record created 2006-10-03, last modified 2018-03-18


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