Abstract

Utilizing a Mo-Si multilayer coated Schwarzschild objective to focus 95 eV photons, we have recently demonstrated better than 0.1 mum resolution as a scanning x-ray transmission microscope. Operating as a scanning photoemission microscope with submicron resolution, we have demonstrated its chemical mapping capabilities by studying a patterned Al/AlO(x) test structure. In addition, we have also studied the cleaved GaAs (110) surface and have identified lateral variations in the surface band bending on the scale of 100 meV. In both experiments, core level microspectroscopy was performed at selected points on the sample to elucidate the image contrast mechanisms.

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