Synchrotron-Radiation-Induced Surface Nitridation of Silicon at Room-Temperature


Published in:
Applied Physics Letters, 50, 9, 533-534
Year:
1987
ISSN:
0003-6951
Note:
Univ wisconsin,dept phys,madison,wi 53706. univ wisconsin,ctr synchrotron radiat,madison,wi 53706. Cerrina, f, univ wisconsin,dept elect & comp engn,madison,wi 53706.
ISI Document Delivery No.: G5172
Laboratories:




 Record created 2006-10-03, last modified 2018-03-18


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