Synchrotron-Radiation-Induced Surface Nitridation of Silicon at Room-Temperature
1987
Details
Title
Synchrotron-Radiation-Induced Surface Nitridation of Silicon at Room-Temperature
Author(s)
Cerrina, F. ; Lai, B. ; Wells, G. M. ; Wiley, J. R. ; Kilday, D. G. ; Margaritondo, G.
Published in
Applied Physics Letters
Volume
50
Issue
9
Pages
533-534
Date
1987
ISSN
0003-6951
Note
Univ wisconsin,dept phys,madison,wi 53706. univ wisconsin,ctr synchrotron radiat,madison,wi 53706. Cerrina, f, univ wisconsin,dept elect & comp engn,madison,wi 53706.
ISI Document Delivery No.: G5172
ISI Document Delivery No.: G5172
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Scientific production and competences > SB - School of Basic Sciences > SB Archives > LSE - Laboratory of Photoelectron Spectroscopy
Scientific production and competences > SB - School of Basic Sciences > SB Archives > LPRX - X-Ray Physics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Scientific production and competences > SB - School of Basic Sciences > SB Archives > LPRX - X-Ray Physics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2006-10-03