Infoscience

Journal article

Synchrotron-Radiation-Induced Surface Nitridation of Silicon at Room-Temperature

    Note:

    Univ wisconsin,dept phys,madison,wi 53706. univ wisconsin,ctr synchrotron radiat,madison,wi 53706. Cerrina, f, univ wisconsin,dept elect & comp engn,madison,wi 53706.

    ISI Document Delivery No.: G5172

    Reference

    Record created on 2006-10-03, modified on 2016-08-08

Fulltext

Related material