Polar ceramics in rf-MEMS and microwave reconfigurable electronics: A brief review on recent issues
Setter, N.; Sherman, V.; Astafiev, K.; Tagantsev, A. K.
2004

Abstract

Properties and fabrication status of microdevices for microwaves based on polar ceramics are reviewed. We discuss bulk acoustic wave devices with AlN films, rf-MEMS capacitive switches with high permittivity materials, and tunable ferroelectrics. The relevant properties of ferroelectrics for microwave applications are summarized with emphasis on composites and thin films.

Details

Title Polar ceramics in rf-MEMS and microwave reconfigurable electronics: A brief review on recent issues
Author(s) Setter, N. ; Sherman, V. ; Astafiev, K. ; Tagantsev, A. K.
Published in Journal of Electroceramics
Volume 13
Issue 1-3
Pages 215-222
Date 2004
ISSN 1385-3449
Keywords
Note Setter, N Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland
886NR
Cited References Count:22
DOI https://doi.org/10.1007/s10832-004-5101-3
Other identifier(s) View record in Web of Science
Laboratories LC
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date 2006-08-21

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