Polar ceramics in rf-MEMS and microwave reconfigurable electronics: A brief review on recent issues

Properties and fabrication status of microdevices for microwaves based on polar ceramics are reviewed. We discuss bulk acoustic wave devices with AlN films, rf-MEMS capacitive switches with high permittivity materials, and tunable ferroelectrics. The relevant properties of ferroelectrics for microwave applications are summarized with emphasis on composites and thin films.


Published in:
Journal of Electroceramics, 13, 1-3, 215-222
Year:
2004
ISSN:
1385-3449
Keywords:
Note:
Setter, N Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland
886NR
Times Cited:0
Cited References Count:22
Laboratories:




 Record created 2006-08-21, last modified 2018-03-17


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