A review is given on the current state of the art in piezoelectric micromachined ultrasonic transducers (pMUT). It is attempted to quantify the limits of pMUT's with respect to the electromechanical coupling, and to relate current achievements. Main needs for future research are identified in design, micromachining and further improvements of PZT films. Applications are shortly reviewed.
Title
Micromachined ultrasonic transducers and acoustic sensors based on piezoelectric thin films
Published in
Journal of Electroceramics
Volume
12
Issue
1-2
Pages
101-108
Date
2004
ISSN
1385-3449
Note
Muralt, P Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland
834YY
Cited References Count:40
Record creation date
2006-08-21