Micromachined ultrasonic transducers and acoustic sensors based on piezoelectric thin films

A review is given on the current state of the art in piezoelectric micromachined ultrasonic transducers (pMUT). It is attempted to quantify the limits of pMUT's with respect to the electromechanical coupling, and to relate current achievements. Main needs for future research are identified in design, micromachining and further improvements of PZT films. Applications are shortly reviewed.


Published in:
Journal of Electroceramics, 12, 1-2, 101-108
Year:
2004
ISSN:
1385-3449
Keywords:
Note:
Muralt, P Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland
834YY
Times Cited:3
Cited References Count:40
Other identifiers:
Laboratories:




 Record created 2006-08-21, last modified 2018-03-17


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