Influence of oxygen flow on crystallization and morphology of LiNbO3 thin films

Polymeric precursor solution (Pechini method) was used to deposit LiNbO3 thin films by spin-coating on (100) silicon substrates. X-ray diffraction data of thin films showed that the increase of oxygen flow promotes a preferred orientation of (001) LiNbO3 planes parallel to the substrate surface. Surface roughness and grain size, observed by atomic force microscopy, change also with oxygen flow.


Published in:
Ferroelectrics, 271, 1623-1628
Year:
2002
ISSN:
0015-0193
Keywords:
Note:
Simoes, Az UNESP, Inst Chem, Dept Chem Phys, CP 355,R 6865, BR-14801970 Araraquara, SP, Brazil UNESP, Inst Chem, Dept Chem Phys, BR-14801970 Araraquara, SP, Brazil Swiss Fed Inst Technol, CH-1015 Lausanne, Switzerland
580CJ
Times Cited:0
Cited References Count:10
Other identifiers:
Laboratories:




 Record created 2006-08-21, last modified 2018-03-17


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