Influence of oxygen flow on crystallization and morphology of LiNbO3 thin films
Polymeric precursor solution (Pechini method) was used to deposit LiNbO3 thin films by spin-coating on (100) silicon substrates. X-ray diffraction data of thin films showed that the increase of oxygen flow promotes a preferred orientation of (001) LiNbO3 planes parallel to the substrate surface. Surface roughness and grain size, observed by atomic force microscopy, change also with oxygen flow.
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Simoes, Az UNESP, Inst Chem, Dept Chem Phys, CP 355,R 6865, BR-14801970 Araraquara, SP, Brazil UNESP, Inst Chem, Dept Chem Phys, BR-14801970 Araraquara, SP, Brazil Swiss Fed Inst Technol, CH-1015 Lausanne, Switzerland
Cited References Count:10
Record created on 2006-08-21, modified on 2016-08-08