Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size

An epitaxial 200 nm thick film of Pb(Zr0.40Ti0.60)O-3 (PZT) has been deposited by reactive rf magnetron sputtering on conductive Nb-doped SrTiO3 (100) (STO). The patterning process involved electron-beam lithography of polymethylmethacrylate, fabrication of a 75 nm thick Cr hard mask layer by means of a lift-off process, and dry etching of PZT. The smallest PZT features obtained were 100 nm in lateral dimensions. Piezoelectric sensitive scanning force microscopy in the contact mode revealed a strong increase of the piezoelectric response for feature sizes with lateral dimensions below 300 nm. It is proposed that this behavior is mainly due to vanishing a domains. (C) 2002 American Institute of Physics.


Published in:
Applied Physics Letters, 80, 17, 3195-3197
Year:
2002
ISSN:
0003-6951
Keywords:
Note:
Buhlmann, S Swiss Fed Inst Technol, Mat Inst, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Mat Inst, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Inst Photon & Quantum Elect, CH-1015 Lausanne, Switzerland
544EB
Times Cited:34
Cited References Count:19
Laboratories:




 Record created 2006-08-21, last modified 2018-03-17


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