Infoscience

Journal article

Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size

An epitaxial 200 nm thick film of Pb(Zr0.40Ti0.60)O-3 (PZT) has been deposited by reactive rf magnetron sputtering on conductive Nb-doped SrTiO3 (100) (STO). The patterning process involved electron-beam lithography of polymethylmethacrylate, fabrication of a 75 nm thick Cr hard mask layer by means of a lift-off process, and dry etching of PZT. The smallest PZT features obtained were 100 nm in lateral dimensions. Piezoelectric sensitive scanning force microscopy in the contact mode revealed a strong increase of the piezoelectric response for feature sizes with lateral dimensions below 300 nm. It is proposed that this behavior is mainly due to vanishing a domains. (C) 2002 American Institute of Physics.

    Keywords: thin-films ; domain ; capacitors ; cells

    Note:

    Buhlmann, S Swiss Fed Inst Technol, Mat Inst, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Mat Inst, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Inst Photon & Quantum Elect, CH-1015 Lausanne, Switzerland

    544EB

    Times Cited:34

    Cited References Count:19

    Reference

    • LC-ARTICLE-2002-004

    Record created on 2006-08-21, modified on 2016-08-08

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