Processing optimization of solution derived PbZr1-xTixO3 thin films for piezoelectric applications
Seifert, A.; Ledermann, N.; Hiboux, S.; Baborowski, J.; Muralt, P.; Setter, N.
2001

Abstract

Processing optimization allowed the sol-gel fabrication of 1 mum thick, phase pure perovskite thin films with identical grain size and controlled texture. This made it possible to fabricate stress compensated beams to measure the transverse piezoelectric coefficient over the whole composition range of PbZr1-xTixO3. The highest value of -12.1 C/m(2) was measured for (100)/(001) textured PZT53/47. For (111) textured films the maximum value of -8.7 C/m(2) was found to be in the tetragonal phase field at 55% Ti.

Details

Title Processing optimization of solution derived PbZr1-xTixO3 thin films for piezoelectric applications
Author(s) Seifert, A. ; Ledermann, N. ; Hiboux, S. ; Baborowski, J. ; Muralt, P. ; Setter, N.
Published in Integrated Ferroelectrics
Volume 35
Issue 1-4
Pages 1889-1896
Date 2001
ISSN 1058-4587
Keywords
Note Seifert, A Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland
411XJ
Cited References Count:25
DOI https://doi.org/10.1080/10584580108016897
Other identifier(s) DAR: 1686
View record in Web of Science
Laboratories LC
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date 2006-08-21

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