Piezoelectric cantilever microphone for photoacoustic GAS detector
Ledermann, N.; Baborowski, J.; Seifert, A.; Willing, B.; Hiboux, S.; Muralt, P.; Setter, N.; Forster, M.
2001

Abstract

New micromachined pressure sensors based on PZT coated silicon cantilevers have been fabricated and integrated in a photoacoustic gas detector. PZT Sol-gel thin films texture and composition were optimized with respect to the transverse piezoelectric coefficient e(31,f). A best value of -12 C/m(2) was obtained with (100)/(001) textured thin films at the MPB composition. Optimum stress compensation between the different layers composing the cantilever has been studied in order to yield flat cantilevers. A high response of 150 mV/Pa with a S/N of 700 at 1 Pa and 1 Hz bandwidth has been measured. The influence of the damping chamber under the cantilever is also reported.

Details

Title Piezoelectric cantilever microphone for photoacoustic GAS detector
Author(s) Ledermann, N. ; Baborowski, J. ; Seifert, A. ; Willing, B. ; Hiboux, S. ; Muralt, P. ; Setter, N. ; Forster, M.
Published in Integrated Ferroelectrics
Volume 35
Issue 1-4
Pages 1907-1914
Date 2001
ISSN 1058-4587
Keywords
Note Ledermann, N Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Siemens Bldg Technol AG Cerberus Div, CH-8708 Mannedorf, Switzerland
411XJ
Cited References Count:7
DOI https://doi.org/10.1080/10584580108016899
Other identifier(s) DAR: 1687
View record in Web of Science
Laboratories LC
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date 2006-08-21

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