Preparation of La1-xSrxCoO3 electrodes for ferroelectric thin films by RF magnetron sputtering
Masumoto, H.; Hiboux, S.; Muralt, P.
1999

Abstract

(100)-oriented stoichiometric LSCO films were deposited on Pt/TiO2/SiO2/Si, TiO2/Pt/TiO2/SiO2/Si and Si substrates with rf magnetron sputtering using a single self fabricated oxide target. Best conductive LSCO film was obtained at 600 degrees C, yielding a specific resistivity of 90 mu Ohm cm. The PZT film deposited on the LSCO(100) electrode oriented to (100) or (001). Maximum value of d(33) coefficientwas 73.5 pm/V.

Details

Title Preparation of La1-xSrxCoO3 electrodes for ferroelectric thin films by RF magnetron sputtering
Author(s) Masumoto, H. ; Hiboux, S. ; Muralt, P.
Published in Ferroelectrics
Volume 225
Issue 1-4
Pages 1141-1147
Date 1999
ISSN 0015-0193
Keywords
Note Masumoto, H Ecole Polytech Fed Lausanne, Lab Ceram, Dept Mat, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Lab Ceram, Dept Mat, CH-1015 Lausanne, Switzerland
227KG
Cited References Count:13
DOI https://doi.org/10.1080/00150199908009143
Other identifier(s) View record in Web of Science
Laboratories LC
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date 2006-08-21

Actions