Growth of (111)-oriented PZT on RuO2(100)/Pt(111) electrodes by in-situ sputtering
Maeder, Thomas; Muralt, Paul; Sagalowicz, Laurent
1999

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Abstract

Growth of (111)-oriented Pb(Zr,Ti)O-3 has been achieved on a RuO2 film which was (100) textured. This texture could be obtained by using a (111)-textured Pt film as a template. The whole layer stack was grown on an amorphous SiO2 layer, that is a thermal oxide of a silicon wafer. A good (111)-orientation of the Pt template layer is thus the starting point of oriented growth. XRD and TEM studies have been carried out to find the orientation relationship between Pt(111), RuO2(100) and PZT(111). (C) 1999 Elsevier Science S.A. All rights reserved.

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Title Growth of (111)-oriented PZT on RuO2(100)/Pt(111) electrodes by in-situ sputtering
Author(s) Maeder, Thomas ; Muralt, Paul ; Sagalowicz, Laurent
Published in Thin Solid Films
Volume 345
Issue 2
Pages 300-306
Date 1999
Publisher Elsevier
ISSN 0040-6090
Keywords
Note Muralt, P Ecole Polytech Fed Lausanne, Dept Mat, Lab Ceram, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Dept Mat, Lab Ceram, CH-1015 Lausanne, Switzerland, 206UD, Times Cited:16, Cited References Count:20
DOI https://doi.org/10.1016/S0040-6090(98)01420-5
Other identifier(s) View record in Web of Science
Laboratories LC
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date 2006-08-21

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