Gas spectrometry based on pyroelectric thin-film arrays integrated on silicon
Willing, B.; Kohli, M.; Muralt, P.; Setter, N.; Oehler, O.
1998

Abstract

We report on a novel gas spectrometry technique using pyroelectric thin-him arrays. The 1 x 50 element arrays of PZT are integrated onto silicon using a membrane structure. The experimental characterization of the pyroelectric elements shows both high voltage and current responses in defined frequency ranges. Mounting the array as a detector in a commercial spectrometer, we demonstrate its capability of detecting the infrared absorption curves of gases by the example of CO2. (C) 1998 Elsevier Science S.A. All rights reserved.

Details

Title Gas spectrometry based on pyroelectric thin-film arrays integrated on silicon
Author(s) Willing, B. ; Kohli, M. ; Muralt, P. ; Setter, N. ; Oehler, O.
Published in Sensors and Actuators a-Physical
Volume 66
Issue 1-3
Pages 109-113
Date 1998
ISSN 0924-4247
Keywords
Note Willing, B Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland Oehler & Fischer AG, CH-6300 Zug, Switzerland
Zj338
Cited References Count:13
DOI https://doi.org/10.1016/S0924-4247(97)01736-6
Laboratories LC
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
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Record creation date 2006-08-21