Gas spectrometry based on pyroelectric thin-film arrays integrated on silicon

We report on a novel gas spectrometry technique using pyroelectric thin-him arrays. The 1 x 50 element arrays of PZT are integrated onto silicon using a membrane structure. The experimental characterization of the pyroelectric elements shows both high voltage and current responses in defined frequency ranges. Mounting the array as a detector in a commercial spectrometer, we demonstrate its capability of detecting the infrared absorption curves of gases by the example of CO2. (C) 1998 Elsevier Science S.A. All rights reserved.


Published in:
Sensors and Actuators a-Physical, 66, 1-3, 109-113
Year:
1998
ISSN:
0924-4247
Keywords:
Note:
Willing, B Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland Oehler & Fischer AG, CH-6300 Zug, Switzerland
Zj338
Times Cited:7
Cited References Count:13
Laboratories:




 Record created 2006-08-21, last modified 2018-03-17


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