Infoscience

Journal article

Gas spectrometry based on pyroelectric thin-film arrays integrated on silicon

We report on a novel gas spectrometry technique using pyroelectric thin-him arrays. The 1 x 50 element arrays of PZT are integrated onto silicon using a membrane structure. The experimental characterization of the pyroelectric elements shows both high voltage and current responses in defined frequency ranges. Mounting the array as a detector in a commercial spectrometer, we demonstrate its capability of detecting the infrared absorption curves of gases by the example of CO2. (C) 1998 Elsevier Science S.A. All rights reserved.

    Keywords: pyroelectrics ; thin-film arrays ; gas spectrometers ; infrared-sensors ; detectors

    Note:

    Willing, B Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland Oehler & Fischer AG, CH-6300 Zug, Switzerland

    Zj338

    Times Cited:7

    Cited References Count:13

    Reference

    • LC-ARTICLE-1998-039

    Record created on 2006-08-21, modified on 2016-08-08

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