Ultrasonic flexural Lamb-wave actuators based on PZT thin film
The fabrication and characterization of a microfabricated acoustic Lamb-wave device driven by a piezoelectric PZT (modified lead zirconate titanate Pb(Zr-x,Ti1-x)O-3) sol-gel thin film for use in mass-transport, mass-filtering and fluid-delivery systems are presented. Ultrasonic flexural plate waves (FPWs) at frequencies of the order of megahertz are generated and detected in a thin acoustic composite membrane by using two interdigitated transducers (IDTs) patterned on a 0.75 mu m thick piezoelectric ceramic PZT film, which provides high acoustic power for physical translation of fluid and microparticles. (C) 1998 Elsevier Science S.A.
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Luginbuhl, P Univ Neuchatel, Inst Microtechnol, Rue Jaquet Droz 1,POB 3, CH-2007 Neuchatel, Switzerland Univ Neuchatel, Inst Microtechnol, CH-2007 Neuchatel, Switzerland Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Lab Ceram MXD, Ecublens, CH-1015 Lausanne, Switzerland
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Record created on 2006-08-21, modified on 2016-08-08