Ultrasonic flexural Lamb-wave actuators based on PZT thin film
Luginbuhl, P.; Collins, S. D.; Racine, G. A.; Gretillat, M. A.; de Rooij, N. F.; Brooks, K. G.; Setter, N.
1998

Abstract

The fabrication and characterization of a microfabricated acoustic Lamb-wave device driven by a piezoelectric PZT (modified lead zirconate titanate Pb(Zr-x,Ti1-x)O-3) sol-gel thin film for use in mass-transport, mass-filtering and fluid-delivery systems are presented. Ultrasonic flexural plate waves (FPWs) at frequencies of the order of megahertz are generated and detected in a thin acoustic composite membrane by using two interdigitated transducers (IDTs) patterned on a 0.75 mu m thick piezoelectric ceramic PZT film, which provides high acoustic power for physical translation of fluid and microparticles. (C) 1998 Elsevier Science S.A.

Details

Title Ultrasonic flexural Lamb-wave actuators based on PZT thin film
Author(s) Luginbuhl, P. ; Collins, S. D. ; Racine, G. A. ; Gretillat, M. A. ; de Rooij, N. F. ; Brooks, K. G. ; Setter, N.
Published in Sensors and Actuators a-Physical
Volume 64
Issue 1
Pages 41-49
Date 1998
ISSN 0924-4247
Keywords
Note Luginbuhl, P Univ Neuchatel, Inst Microtechnol, Rue Jaquet Droz 1,POB 3, CH-2007 Neuchatel, Switzerland Univ Neuchatel, Inst Microtechnol, CH-2007 Neuchatel, Switzerland Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Lab Ceram MXD, Ecublens, CH-1015 Lausanne, Switzerland
Ym107
Cited References Count:9
DOI https://doi.org/10.1016/S0924-4247(98)80056-3
Other identifier(s) View record in Web of Science
Laboratories LC
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date 2006-08-21

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