Piezoelectric thin films for MEMS

A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The materials figure of merits are given for various applications and discussed. The coupling coefficient for ultrasonic applications is treated in more detail.


Published in:
Integrated Ferroelectrics, 17, 1-4, 297-307
Year:
1997
ISSN:
1058-4587
Keywords:
Note:
Muralt, P Swiss Fed Inst Technol,Lab Ceram,Lausanne,Switzerland
Yf222
Times Cited:47
Cited References Count:35
Laboratories:




 Record created 2006-08-21, last modified 2018-03-17


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