Piezoelectric thin films for MEMS
A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The materials figure of merits are given for various applications and discussed. The coupling coefficient for ultrasonic applications is treated in more detail.
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Muralt, P Swiss Fed Inst Technol,Lab Ceram,Lausanne,Switzerland
Cited References Count:35
Record created on 2006-08-21, modified on 2016-08-08