000088878 001__ 88878
000088878 005__ 20181203020512.0
000088878 022__ $$a0924-4247
000088878 02470 $$2ISI$$aA1997XU01400029
000088878 037__ $$aARTICLE
000088878 245__ $$aPyroelectric thin-film sensor array
000088878 260__ $$c1997
000088878 269__ $$a1997
000088878 336__ $$aJournal Articles
000088878 500__ $$aKohli, M Ecole Polytech Fed Lausanne,Lab Ceram,Ch-1015 Lausanne,Switzerland Cerberus Ag,Ch-8708 Mannedorf,Switzerland
000088878 500__ $$aXu014
000088878 500__ $$aTimes Cited:56
000088878 500__ $$aCited References Count:16
000088878 520__ $$aPyroelectric thin-film point detectors and 1 x 12 arrays have been fabricated and characterized. They consist of sol-gel-deposited PZT thin-film elements on micromachined Si3N4/SiO2 membranes. The measured current and voltage response as a function of modulation frequency of a 1 x 12 array element is compared with finite-element calculations. Voltage responsivities of almost 3000 V W-1 in vacuum and 800 V W-1 in air have been achieved for 0.4 mm x 0.9 mm elements. Some point detectors have been completely packaged and correct operation in a movement detection system has been demonstrated.
000088878 6531_ $$aferroelectric materials
000088878 6531_ $$apyroelectric detectors
000088878 6531_ $$asensor arrays
000088878 6531_ $$athin-film sensors
000088878 6531_ $$adetectors
000088878 6531_ $$adevices
000088878 700__ $$aKohli, M.
000088878 700__ $$aWuethrich, C.
000088878 700__ $$aBrooks, K.
000088878 700__ $$aWilling, B.
000088878 700__ $$aForster, M.
000088878 700__ $$0240369$$g105945$$aMuralt, P.
000088878 700__ $$g106416$$aSetter, N.$$0240019
000088878 700__ $$aRyser, P.
000088878 773__ $$j60$$tSensors and Actuators a-Physical$$k1-3$$q147-153
000088878 909C0 $$xU10334$$0252012$$pLC
000088878 909CO $$pSTI$$particle$$ooai:infoscience.tind.io:88878
000088878 937__ $$aLC-ARTICLE-1997-019
000088878 970__ $$a373/LC
000088878 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000088878 980__ $$aARTICLE