Pyroelectric thin-film sensor array

Pyroelectric thin-film point detectors and 1 x 12 arrays have been fabricated and characterized. They consist of sol-gel-deposited PZT thin-film elements on micromachined Si3N4/SiO2 membranes. The measured current and voltage response as a function of modulation frequency of a 1 x 12 array element is compared with finite-element calculations. Voltage responsivities of almost 3000 V W-1 in vacuum and 800 V W-1 in air have been achieved for 0.4 mm x 0.9 mm elements. Some point detectors have been completely packaged and correct operation in a movement detection system has been demonstrated.


Published in:
Sensors and Actuators a-Physical, 60, 1-3, 147-153
Year:
1997
ISSN:
0924-4247
Keywords:
Note:
Kohli, M Ecole Polytech Fed Lausanne,Lab Ceram,Ch-1015 Lausanne,Switzerland Cerberus Ag,Ch-8708 Mannedorf,Switzerland
Xu014
Times Cited:56
Cited References Count:16
Laboratories:




 Record created 2006-08-21, last modified 2018-03-17


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