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Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions
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Piezoelectric actuation of PZT thin-film diaphragm[...]
-
Muralt, Paul
et al
main
file(s):
1996 Muralt SNA - PZT actuation of diaphragms static resonant - preprint
version 1
1996 Muralt SNA - PZT actuation of diaphragms static resonant - preprint.pdf
[1.84 MB]
03 Nov 2020, 14:02
Preprint