Journal article

PZT thin films for micro sensors and actuators

The paper reviews different aspects of deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for application in micromechanical systems. The deposition of such films and the principal processes for their integration onto silicon substrates are now fairly well mastered. Current efforts concentrate on tailoring the film properties for the various applications, and on optimization of the device designs and patterning processes. Current work on an ultrasonic micromotor and a pyroelectric IR detector is presented and discussed.


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