PZT thin films for micro sensors and actuators
The paper reviews different aspects of deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for application in micromechanical systems. The deposition of such films and the principal processes for their integration onto silicon substrates are now fairly well mastered. Current efforts concentrate on tailoring the film properties for the various applications, and on optimization of the device designs and patterning processes. Current work on an ultrasonic micromotor and a pyroelectric IR detector is presented and discussed.
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Keywords: micromechanical systems ; pzt thin films ; integration onto silicon substrates ; ultrasonic micromotors ; ir detectors ; pzt ferroelectric materials ; mocvd ; metal-organic-chemical vapor deposition ; mod ; metal-organic decomposition ; piezoelectric microactuators ; misfit relaxation mechanisms ; chemical-vapor-deposition ; domain configurations ; growth ; titanate ; silicon ; pbtio3
Ecole Polytech Fed Lausanne,Dept Mat,Lab Ceram,Ch-1015 Lausanne,Switzerland
Cited References Count:31
Record created on 2006-08-21, modified on 2016-08-08