Journal article

Hybrid ultrasonic elastic force motors micromachined in silicon

A micromotor for low power applications is being developed using silicon micromachining technologies and organometallic PZT films sol-gel deposition. The construction of a hybrid ultrasonic motor suitable for batch fabrication is proposed. A fabrication process for the stator resonator compatible with both bulk micromachining and 0.3 mu m PZT films deposition on a SiNx/Ta/Pt substrate has been tested. Comparison of PZT actuated and previously fabricated ZnO actuated diaphragms are performed using laser interferometry, PZT samples show promising results for applications where a low voltage operation is a key benefit. Poled PZT films are obtained after process completion and influence of DC biases on the resonance frequencies are observed.


    Racine, Ga Univ Neuchatel,Inst Microtechnol,Rue Al Breguet 2,Ch-2000 Neuchatel,Switzerland Smh,Lab Rech Grp,Asulab Sa,Ch-2001 Neuchatel,Switzerland Ecole Polytech Fed Lausanne,Lab Ceram,Ch-1015 Lausanne,Switzerland, Uf352, Times Cited:2, Cited References Count:11


    Record created on 2006-08-21, modified on 2017-05-10


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