A micromotor for low power applications is being developed using silicon micromachining technologies and organometallic PZT films sol-gel deposition. The construction of a hybrid ultrasonic motor suitable for batch fabrication is proposed. A fabrication process for the stator resonator compatible with both bulk micromachining and 0.3 mu m PZT films deposition on a SiNx/Ta/Pt substrate has been tested. Comparison of PZT actuated and previously fabricated ZnO actuated diaphragms are performed using laser interferometry, PZT samples show promising results for applications where a low voltage operation is a key benefit. Poled PZT films are obtained after process completion and influence of DC biases on the resonance frequencies are observed.