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Fabrication and Characterization of Pzt Thin-Film Vibrators for Micromotors
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Fabrication and Characterization of Pzt Thin-Film [...]
-
Muralt, Paul
et al
main
file(s):
1995 Muralt SNA - Si-PZT membrane vibrators for micromotors - preprint
version 1
1995 Muralt SNA - Si-PZT membrane vibrators for micromotors - preprint.pdf
[1.4 MB]
03 Nov 2020, 14:02
Preprint