Details
Title
Thin-Film Sputter Deposition for Hybrid Applications
Author(s)
Muralt, P. ; Seidel, J. P.
Published in
Vacuum
Volume
41
Issue
4-6
Pages
1400-1402
Date
1990
ISSN
0042-207X
Note
Muralt, P Balzers Ag,Proc & Equipment Labs,Ch-9496 Balzers,Switzerland
Ee547
Cited References Count:3
Ee547
Cited References Count:3
Laboratories
LC
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2006-08-21